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Process and device for reducing the ignition voltage of plasmas operated using pulses of pulsed power

机译:降低使用脉冲功率脉冲操作的等离子体的点火电压的方法和装置

摘要

Process and device for reducing an ignition voltage of power pulses in plasmas operated in a pulsed manner with long pulse-off times. The process includes generating a power pulsed plasma at a pulse duty factor, the pulse duty factor being a ratio of pulse-on time to pulse-off time, and at least before the beginning of the pulse-on time of the power pulses, producing charge carriers using an additional plasma discharge at a lower power than that of the power pulses. The device includes a vacuum chamber including at least one pump system, an arrangement for producing plasma, the arrangement including at least one anode and at least one cathode, an energy source connected to the cathode and the anode which can be pulsed in the frequency range of between approximately 10 Hz to approximately 1 MHZ, and a mechanism for one of producing an additional plasma discharge.
机译:用于降低以长脉冲关闭时间以脉冲方式操作的等离子体中的功率脉冲的点火电压的方法和装置。该过程包括以脉冲占空比产生功率脉冲等离子体,该脉冲占空比是脉冲接通时间与脉冲断开时间之比,并且至少在功率脉冲的脉冲接通时间开始之前,产生使用额外的等离子放电以比功率脉冲更低的功率对载流子进行充电。该装置包括:真空室,该真空室包括至少一个泵系统;用于产生等离子体的装置;该装置包括至少一个阳极和至少一个阴极;连接到该阴极和该阳极的能量源,该能量源可以在频率范围内被脉冲化在大约10Hz到大约1MHZ之间的频率,以及用于产生附加等离子体放电之一的机构。

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