Plasma generating apparatus, plasma generating method and gas processing method by plasma reaction

摘要

A plasma generating apparatus comprises a pair of electrodes consisting of an electrode connected to an AC power source and a grounded electrode. An inorganic dielectric substance containing barium titanate as a principal component is filled between the electrodes. It is possible to generate a stable and uniform glow discharge under the atmospheric pressure at low cost by applying a considerably low voltage between said electrodes.