Hexaaryl biimidazole compounds as photoinitiators, photosensitive composition and method of manufacturing patterns using the compounds

摘要

A hexaaryl biimidazole compound useful as a photoinitiator, represented by Formula (I): ;wherein each R group represents an alkyl group which may be the same or different, and each X group is independently a fluorine or hydrogen. The compound (I) is particularly useful as an initiator in a photosensitive composition containing a polyimide precursor, which is curable under patternwise low radiation exposure to give a patterned layer having heat and chemical resistance.