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Ultra-thin nucleation layer for magnetic thin film media and the method for manufacturing the same

机译:用于磁性薄膜介质的超薄成核层及其制造方法

摘要

In this invention, an ultra thin layer of CoCr alloy nucleation layer is sputtered at an extremely low deposition rate above a predominantly (200) oriented Cr film followed by a CoCrPt based alloy sputtered film at higher rates and moderate temperatures. This structure creates a media which has very high Hc, and excellent PW50, low noise and excellent low TNLD values. By using this technique, the CoCrPt magnetic film achieves excellent in-plane crystallographic orientation, and high Hc is achieved with minimal amount of Pt addition to the magnetic film. The method allows very fine grain structure of cobalt to be formed which contributes to good signal to noise ratio. A fine grain structure combined with chromium segregation between the grains improve the signal to noise ratio even more. A high degree of in-plane c-axis orientation is achieved in the cobalt layer which provides very high hysteresis loop squareness which helps to improve the OW and TNLD. The perfection of the grains is very high so that high anisotropy is obtained in the magnetic layer, resulting in high Hc without the necessity of addition of high level of Pt. The high degree of crystalline perfection also contributes to low TNLD.
机译:在本发明中,将CoCr合金成核层的超薄层以极低的沉积速率溅射到主要(200)取向的Cr膜上方,随后以较高的速率和中等温度以CoCrPt基合金溅射膜溅射。这种结构产生的介质具有非常高的Hc,优异的PW50,低噪声和出色的TNLD值。通过使用该技术,CoCrPt磁性膜实现了出色的面内晶体学取向,并且在向磁性膜中添加最少的Pt的情况下实现了高Hc。该方法允许形成非常精细的钴晶粒结构,这有助于良好的信噪比。细晶粒结构与晶粒之间的铬偏析相结合,可进一步提高信噪比。在钴层中实现了高度的面内c轴取向,这提供了非常高的磁滞回线矩形度,有助于改善OW和TNLD。晶粒的完美度非常高,因此在磁性层中获得了高的各向异性,从而导致了Hc高,而无需添加高含量的Pt。高度结晶完美也有助于降低TNLD。

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