PROCESS FOR CARRYING OUT THE MAGNETIC FIELD SENSOR ON FIELD EMISSION

摘要

The invention relates to a process for carrying out the magnetic field sensor based on field emission stabilized by means of an active MOSFET device (source of constant current in saturation conditions), for which, in order to stabilize the emission current, to increase the emission current and implicitly to increase the device structure sensitivity, the emitters are structured in a MOSFET drain. According to the invention, the process consists in carrying out the emitters by two-step corroding with reactive ions (RIE), first a corroding in a mixture of CT 4 and O 2 at higher RF powers and then the corroding in a mixture of SF 6 and O 2, at lower RF powers, there being achieved p/n junctions by ion implanting with phosphorus ions in the vertical emitters in the drain and in the source both for controlling and stabilizing the emission current and for obtaining a multiplication of the emission current by the effect of conductivity induced by electron bombardment. The thermic oxidation and sharpening of the emitters are performed in different technological steps in order to control both the oxide thickness, consequently, the emitters height and curvature radius of the emitters as well.