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MICROMACHINED VIBRATORY RATE GYROSCOPE

机译:微机械振动率陀螺仪

摘要

A microfabricated gyroscope (20) includes proof mass (22) connected to a frame or substrate (24) to measure rotation about an axis parallel to the surface of the substrate. The micromachined gyroscope includes a suspension system (30), a drive system (32) used to sustain oscillation of the proof mass (22) and a sensing system (34) used to detect deflections of the proof mass (22). The proof mass includes a plurality of electrode fingers (38). Voltage sources (120, 122, 124, 126) apply a voltage to sense fingers (74a-b, 76a-b) of sense electrodes (62a-b) to provide bias voltages to nullify quadrature error, select or adjust the resonant frequency of vibrations of the mass along the sense axis and cancel any centrifugal or other low-frequency forces.
机译:微型陀螺仪(20)包括检测质量块(22),该检测质量块(22)连接到框架或基板(24),以测量绕平行于基板表面的轴的旋转。微机械陀螺仪包括悬架系统(30),用于维持检验质量块(22)的振动的驱动系统(32)和用于检测检验质量块(22)的挠曲的感测系统(34)。检验质量块包括多个电极指(38)。电压源(120、122、124、126)向感应电极(62a-b)的感应指(74a-b,76a-b)施加电压,以提供偏置电压以消除正交误差,选择或调整谐振频率。沿传感轴的质量振动,消除了任何离心力或其他低频力。

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