VACUUM CATHODIC ARC EVAPORATION PROCESS FOR THE PREPARATION OF WEAR RESISTANT COATINGS

摘要

Wear resistant coating deposited on a substrate, containing B and N elements, is created at least by two layers of which the first layer has internal stress exceeding 1 GPa, thickness exceeding 0.1 νm and consists predominantly of Ti and N elements, the second layer being created predominantly by Ti, N, B elements, with at least 5 % contents of B and thickness at least 0.5 νm. The process of creating a wear resistant coating on a substrate by depositing is performed by vapor plating by low voltage arc in a reaction atmosphere by way of a physical method (PVD) and/or chemical method from a gaseous phase under the presence of plasma (PACVD), the ionisation of plasma for depositing by PACVD being effected by low voltage arc. The apparatus for preparing wear resistant layers using the method of low voltage arc with cathode (2, 2a, 2b) being arranged in a coating chamber. The axes of cathode (2, 2a, 2b) is substantially vertical, a source of magnetic field being available for the cathode (2, 2a, 2b). The source of magnetic field is preferably at least one electromagnetic coil (11, 12, 11a, 11B, 12a, 12b).