Vacuum arc evaporator, for coating substrates with electrical, electronic or optical metal or metal compound layers, has an insulated anode surrounded on all sides by evaporated cathode material

摘要

A vacuum arc evaporator, having an anode (2) enclosed by an insulated sleeve (3) and surrounded on all sides by evaporated cathode material, is new. An Independent claim is also included for a method of coating substrates using the above vacuum arc evaporator.