USE OF SCATTERED AND/OR TRANSMITTED LIGHT IN DETERMINING CHARACTERISTICS, INCLUDING DIMENSIONAL INFORMATION, OF OBJECT SUCH AS PART OF FLAT-PANEL DISPLAY

摘要

Scattered or/and transmitted light is employed to determine characteristics, including dimensional information, of an object (60) such as part (10) of a flat-panel display. The dimensional information includes the average diameter of openings (62) in the object, the average density of the openings, and the average thickness of a layer (64) of the object. Light-diffraction patterns are produced to determine characteristics, such as abnormalities (146 and 148), of crossing lines (140 and 142) in such an object.