USE OF SCATTERED AND/OR TRANSMITTED LIGHT IN DETERMINING CHARACTERISTICS, INCLUDING DIMENSIONAL INFORMATION, OF OBJECT SUCH AS PART OF FLAT-PANEL DISPLAY

摘要

SCATTERED OR/AND TRANSMITTED LIGHT IS EMPLOYED TO DETERMINE CHARACTERISTICS, INCLUDING DIMENSIONAL INFORMATION, OF AN OBJECT (60) SUCH AS PART (10) OF A FLAT-PANEL DISPLAY. THE DIMENSIONAL INFORMATION INCLUDES THE AVERAGE DIAMETER OF OPENINGS (62) IN THE OBJECT, THE AVERAGE DENSITY OF THE OPENINGS, AND THE AVERAGE THICKNESS OF A LAYER (64) OF THE OBJECT. LIGHT-DIFFRACTION PATTERNS ARE PRODUCED TO DETERMINE CHARACTERISTICS, SUCH AS ABNOMALITIES (146 AND 148),OF CROSSING LINES (140 AND 142) IN SUCH AN OBJECT.