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MULTILAYER CARBON-BASED FIELD EMISSION ELECTRON DEVICE FOR HIGH CURRENT DENSITY APPLICATIONS

机译:高电流密度应用中的多层碳基场发射电子装置

摘要

Offer is placed in reactor by electric field emission substrate, heat the substrate and also supplied hydrogen and carbonaceous gas concentration be about 8 to 13 1 percent to reactor while supplying energy to admixture of gas is temporarily greater than about 0. in substrate proximity to grow the thickness of the first layer of carbon-based material5 microns, then reducing the carbonaceous gas of concentration and continued and grow the second layer of carbon-based material, the second layer is thicker compared with first layer. Substrate and first layer application of electrode are then removed to the second layer. The device be it is independent, may be used as in the various electronic equipments of cold cathode, such as cathode-ray tube, amplifier and travelling-wave tubes. The growth that the surface of substrate can be patterned first layer generates patterned surface device for dispensing on the field before.
机译:要点是通过电场发射基板将其放置在反应器中,加热基板,并向反应器供应的氢气和含碳气体浓度约为8%至13 1%,同时向混合气体中供应的能量暂时大于约0。在基板附近生长第一层碳基材料的厚度为5微米,然后降低碳质气体的浓度并继续生长第二层碳基材料,第二层比第一层更厚。然后将衬底和电极的第一层施加去除到第二层。该设备是独立的,可用于冷阴极的各种电子设备,如阴极射线管,放大器和行波管。衬底的表面可以被图案化的第一层的生长产生了图案化的表面器件,用于在场上分配。

著录项

  • 公开/公告号EP1327255A1

    专利类型

  • 公开/公告日2003-07-16

    原文格式PDF

  • 申请/专利权人 EXTREME DEVICES INC.;

    申请/专利号EP20000967311

  • 发明设计人 PATTERSON DONALD E.;JAMISON KEITH D.;

    申请日2000-10-04

  • 分类号H01J9/02;H01J1/304;

  • 国家 EP

  • 入库时间 2022-08-21 23:49:25

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