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MULTILAYER CARBON-BASED FIELD EMISSION ELECTRON DEVICE FOR HIGH CURRENT DENSITY APPLICATIONS
MULTILAYER CARBON-BASED FIELD EMISSION ELECTRON DEVICE FOR HIGH CURRENT DENSITY APPLICATIONS
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机译:高电流密度应用中的多层碳基场发射电子装置
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摘要
Offer is placed in reactor by electric field emission substrate, heat the substrate and also supplied hydrogen and carbonaceous gas concentration be about 8 to 13 1 percent to reactor while supplying energy to admixture of gas is temporarily greater than about 0. in substrate proximity to grow the thickness of the first layer of carbon-based material5 microns, then reducing the carbonaceous gas of concentration and continued and grow the second layer of carbon-based material, the second layer is thicker compared with first layer. Substrate and first layer application of electrode are then removed to the second layer. The device be it is independent, may be used as in the various electronic equipments of cold cathode, such as cathode-ray tube, amplifier and travelling-wave tubes. The growth that the surface of substrate can be patterned first layer generates patterned surface device for dispensing on the field before.
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