Apparatus for modifying surface of object using plasma and method for modifying surface using said apparatus

摘要

PURPOSE: A plasma surface treatment device and method thereof is provided to uniformly reform the surface of a sample with complicated shape by increasing the density of an ion within a chamber. CONSTITUTION: A plasma surface treatment device is composed of a chamber(1), a couple of microwave generator(5), a couple of electrodes(3) installed in the chamber, a power supply unit(4) supplying an alternating current to the electrodes, a tray(9) installed away a predetermined space from the electrodes, a net(10) put on the tray, a cooling line(11) installed at the electrodes, and a cooling unit supplying cooling water.