Apparatus for modifying surface of object using plasma and method for modifying surface using said apparatus

摘要

PURPOSE: A plasma surface treatment device and method thereof is provided to uniformly reform all the surface of a sample by leaving a predetermined space between the sample and an electrode and treating the surface of the sample. CONSTITUTION: A plasma surface treatment device is composed of a chamber(10), a couple of electrodes(40,50) installed in the chamber, a net(60) installed away a predetermined space from the electrodes, and a power supply unit(70) supplying an alternating current to the electrodes.