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EXPOSURE DEVICE FOR STRIP-LIKE WORKPIECE WITH MEANDERING CORRECTION MECHANISM
EXPOSURE DEVICE FOR STRIP-LIKE WORKPIECE WITH MEANDERING CORRECTION MECHANISM
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机译:带有矫正机构的条状工件曝光设备
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摘要
PURPOSE: To correct a zigzag with high precision and also to reliably correct it even when a thin work or static electricity is generated. CONSTITUTION: Edge detecting units 2 and 2' for photographing the edge of the belt shape work W are arranged at two places in a belt shape work W transport direction. A mask 2c having a linear part which crosses with the work edge is arranged in the visual fields of CCD cameras 2a of the edge detecting units 2 and 2'. An L shape or a recessed shape pattern which is obtained by the mask and the edge of the belt shape work W is registered in an image processing part 3. The image processing part 3 obtains the position coordinates of the edge of the work W by searching the images of the edge detecting units 2 and 2'. A control part 4 calculates the zigzag amount of the belt shape work W from the work edge position coordinates, outputs a control signal when the amount is larger than a predetermined zigzag amount and moves the work W in the width direction and/or the rotary direction so as to correct the zigzag amount.
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