Wettable transmission repression method for organic electro luminescence device

摘要

PURPOSE: A moisture permeation suppressing method is provided to be capable of alleviating life reduction of a device due to deterioration of an organic electro luminescence device due to moisture permeation into an organic film. CONSTITUTION: In an organic electro luminescence device having an anode(101), an organic layer(102) and a cathode(103) sequentially formed on a substrate(100), a high polymer thin film is formed on the anode using a plasma polymerization method. The high polymer is a silicon-contained hexamethyldisioxane(HMDSO). The plasma polymerization method forms an organic polymer shape or an inorganic silica shape according to a reaction gas. The organic polymer shape is a plasma polymerization method using one of Ar, He and N2, and the inorganic silica shape is a plasma polymerization method using O2.