EPOXY APPLICATION PATTERN FOR BONDING SILICON WAFER WITH PYREX GLASS

摘要

PURPOSE: An epoxy coating pattern for adhering a silicon wafer and a pyrex glass is provided to improve the reliability of the manufacturing products such as a planar optical waveguide device by minimizing the occurrence of air void during the pyrex glass connection by coating the epoxy coating pattern to couple the silicon wafer and the pyrex glass in response to the shape of the silicon wafer. CONSTITUTION: An epoxy coating pattern(10) for adhering a circular silicon wafer(11) and a pyrex glass is characterized in that at least of three epoxy coating lines(15) coated along a straight line across the center of the circular silicon wafer(11) are coated in such a way that each of the at least of the three epoxy coating lines(15) is inclined at a predetermined angle interval with respect to each other.