4 A Compact Scanning Confocal Microscope with a surface following effect using a Quad-detector and a Calibration of error signal according to reflectance

摘要

PURPOSE: A small-sized scanning confocal microscope having a surface tracking effect by using a quad-photo detection method and an error signal correction method according to reflexibility is provided to scan a broad area of a sample by using a short wavelength laser light source, a quad-photo detector, a cylindrical lens, and a tilting mirror. CONSTITUTION: A small-sized scanning confocal microscope having a surface tracking effect by using a quad-photo detection method and an error signal correction method according to reflexibility includes a short wavelength laser light source(1), a magnetic galvanometer and a tilting mirror(3), an objective lens(4), a quad-photo detector, and a cylindrical lens(6). The short wavelength laser light source(1) provides the light to an optical path connected to a sample(5). The galvanometer and the tilting mirror(3) are used for controlling the focus and the scan region of the light of the short wavelength laser light source(1). The objective lens(4) is used for providing the reflective light from the point of the sample(5). The quad-photo detector is used for detecting the reflective light from the point of the sample(5). The cylindrical lens(6) is used for performing function of a lens to one direction.