An ozone discharge tube and an ozone generation apparatus using it

摘要

PURPOSE: An ozone discharge tube and ozone generator thereof are provided, which can stabilize ozone generating characteristics regardless of gas feeding rate by applying high frequency wave power to high pressure region of ozone generating tube. CONSTITUTION: The ozone discharge tube comprises an inner electrode(10) to which high frequency waves are impressed; an outer electrode(12) which surrounds the inner electrode with spaced apart from the inner electrode; a space where ozone gas is generated by silent corona discharge between the inner electrode and the outer electrode; and a spacer(16) which keeps a gap between the inner electrode and the outer electrode, and controls temperature rise inside an ozone discharge tube.