Device for confirming bad coating in Spin On Glass Line

摘要

The purpose of the present invention is to detect when chemical coating is not applied smoothly in the spin-on glass process, and to prevent any further chemical application by stopping the process to reduce the loss of wafers. To provide a coating failure confirmation device.;Accordingly, the present invention includes a chemical sensitive sensor for detecting the coating state of the wafer edge in the spin coating machine of the spin-on glass process, which is located inside the coating chamber of the spin coating machine and placed in the chamber. Provided is a coating failure checking apparatus for a spin on glass process.