HIGH-RELIABILITY NARROW-BAND INDUSTRIAL EXCIMER LASER OF MODULAR DESIGN BUILT AROUND KRYPTON FLUORIDE

摘要

FIELD: laser engineering. SUBSTANCE: laser built around KrF is designed for round-the-clock operation in production of integrated circuits by lithographic method. Novelty is that laser has single tube of pre-ionization device disposed at input. Fluorine concentration in working medium is reduced, Anode supporting plate is shaped so as to reduce opposing aerodynamic forces onto fan bearings. Pulse power circuit system is changed to ensure shorter pulse rise time. Reflection factor of output radiation coupler is greatly increased. Radiation line contraction module has beam stretcher and wavelength measuring device of higher precision. Laser control computer operates according to program using improved pulse energy control algorithm. Laser provides for generating lasing pulses of 10 mJ energy at frequency of 1000 Hz and at radiation spectrum width of 0.6 pm and smaller. EFFECT: enhanced operating reliability of laser. 15 cl, 20 dwg