Arrangement for holding semiconducting wafer with electrical connecting elements on one side for testing has stop restricting restraining device movement and for force-locking connection

摘要

The arrangement has an outer bearer with a base plate, an inner bearer that fits in the outer bearer for placement on the base plate and holding the wafer and at least one restraining device for exerting a force on the wafer towards the base plate. At least one stop in the inner bearer restricts movement of the restraining device towards the base plate and is designed to achieve a force-locking connection with the restraining device. The arrangement has an outer bearer (4) with a base plate (6) with electrical connection surfaces on a main side for contacting the wafer's (1) connection elements, an inner bearer (5) that fits in the outer bearer for placement on the base plate and for holding the wafer and at least one restraining device (10,11) movably mounted on the outer bearer for exerting a force on the wafer towards the base plate. At least one stop (12) in the inner bearer restricts movement of the restraining device towards the base plate and is designed to achieve a force-locking connection with the restraining device.