Production of silicon granulate, used for electronic device or solar cell manufacture, includes two-phase cyclic process with unfluidized or hardly fluidized bed of silicon particles during deposition and alternating with fluidization

摘要

In the production of very pure silicon (Si) granulate by decomposition of a Si source gas (I) in a bed of Si particles, the process is carried out cyclically in two phases, in which (1) the gas mixture flowing through the reactor does not fluidize or hardly fluidizes the Si bed during deposition and (2) the bed is fluidized to prevent adhesion and eliminate temperature inhomogeneities.