Membrane valve for pipeline systems for high purity applications, e.g. the semiconducting industry, has screw connections with spring screws with spring and threaded regions

摘要

The membrane valve has a lower housing part with a medium flow channel, at least one further housing part, whereby the housing parts are joined together by screw connections (15) using spring screws (1) with at least one spring region (4) and at least one threaded region (5). The housing parts (11-13) are made of a synthetic material.