A method for measuring a characteristic of a capacitive sensor, the apparatus for measuring a sensor characteristic, capacitive sensor and ic - chip to the measurement of a sensor characteristic

摘要

First and second predetermined charging voltages are arranged between the movable and fixed electrodes of a capacitive sensor is applied in order first and second capacitances between the movable or fixed electrodes to measure. The first and second electrostatic capacitances are compared, in order to provide a characteristic of the sensor from the result of the comparison, it is possible to achieve the. During the measurement of the first and second capacitors are first and second charge voltages is generated whose sizes corresponding to the first and second capacitances are determined. It is a compensation between the first output voltage, when the first charging voltage between the movable and fixed electrodes in a predetermined normal state of the movable electrode is applied, and the second output voltage, which is output when the second charging voltage between the movable and fixed electrodes in a predetermined normal state is applied.