A method for the calibration and orientation of a plurality of more axes of movement stages for an optical alignment with a planar - waveguide - device and a planar - waveguide - system

摘要

An optical system for detecting and coupling of light with optical devices as well as a method for aligning and calibrating of the system. The system comprises positioning stages and fiber sensors. The fiber sensors are used, for the positions of the calibration pieces and other sensors in a variety of configurations to detect. Starting from these detected positions, can be a any misalignment of the sensors or positioning stages are calculated and corrected. The fiber sensors calibrating the system.