Rotation rate sensor using Coriolis measuring effect has force mediating devices acting between substrate and relatively displaced sensor elements

摘要

The sensor has a Coriolis element (2a,2b) applied to the surface of a substrate, with stimulation of the Coriolis element so that it oscillates parallel to a given axis (X) parallel to the substrate and detection of a deviation in the Coriolis element caused by a Coriolis force along a perpendicular axis (Y) in the same plane. Sensor elements (1a,1b,2a,2b,3a,3b) can be displaced relative to the substrate with force mediating devices, e.g. compensation structures (19,20), for mediating a static force between the substrate and at least one of the sensor elements.