Three-dimensional electron beam gas ion lithograph for generating three-dimensional structures deposits given images in vacuum chamber and the scanner electron microscope is supplemented with mini gas pressure chamber

摘要

The lithograph deposits given images in a vacuum chamber (1) using controlled electron beam and purposeful placing of ionized gases. A scanner electron microscope is supplemented with at least a mini gas pressure chamber (5). The gas output from the gas pressure chamber is controllable using a feeding tip, a heated pressure chamber, controllable valves for gas output and aeration and pressure and temperature sensor technology.