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PROCEDURES AND EQUIPMENT FOR THE IDENTIFICATION OF SEICHES ON MORE SILIZIUM PLATES
PROCEDURES AND EQUIPMENT FOR THE IDENTIFICATION OF SEICHES ON MORE SILIZIUM PLATES
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机译:在更多的硅片上鉴定SEICHES的程序和设备
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摘要
Process for identifying characters, which are formed on a plurality (2) of silicon sheets, whereby the sheets are arranged in parallel planes (P0) and are aligned relative to the support (1), and comprises: inserting luminous reflector (5) between a first (2a) and a second (2b) successive sheet of the plurality of sheets starting from underneath the plurality of sheets; illuminating the characters, which are formed on the first sheet, via the intermediacy of a first incident luminous ray (R1) which is reflected by the luminous reflector and which are inserted between the first and the second successive sheets in such a way that the first incident luminous ray, which is reflected by part of the first sheet which is parallel to the parallel planes (P0), shall be directed in a direction which is different from the direction of the optical axis of observation (AO); observing the characters, which are being illuminated, of the first sheet in the direction of the optical axis, whereby the optical axis is rectilinear and arranged, at least in part, under the plurality of sheets. identifying the characters which are being observed.
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