Thermopiles has thermojonctions of the type flowmeters thermal radiation and conductive using these thermopiles, as well as their manufacturing.

摘要

A distributed thermojunction type thermopile for conductive or radiant heat exchange measurement has thermal discontinuity zones (7) formed directly below the thermojunctions (4) in a higher thermal conductivity substrate (3) especially of silicon. A distributed thermojunction type thermopile, for conductive heat exchange measurement has a thermal discontinuity zone (7) formed directly below each second thermojunction (4) in a higher thermal conductivity substrate (3). Independent claims are also included for the following: (i) a distributed thermojunction type thermopile for radiant heat exchange measurement having a thermal discontinuity zone (7) formed directly below each thermojunction (4) in a higher thermal conductivity substrate (3); (ii) conductive and radiant heat fluxmeters comprising the above thermopile; and (iii) processes for producing the above heat fluxmeters. Preferred Features: Each thermal discontinuity zone (7) is delimited by a cavity (8) in a substrate having a thermal conductivity of -1 W/m.K, especially a silicon substrate (3).