Manufacture of a nanotube between two electrical conductors on a substrate is carried out in a deposition chamber, a power microwave, a magnetic field, a cyclotronic resonance zone with ionization and/or dissociation of a carbonated gas

摘要

Fabrication of nanotube between two electrical conductors on a substrate uses power microwave in deposition chamber with gas containing organic molecules injected at low pressure. It also uses magnetic field and cyclotronic electronic resonance zone(s) favoring ionization and/or disassociation of injected gas. The fabrication of a nanotube between two electrical conductors on a substrate (8), uses a power microwave in a deposition chamber (6) with a gas containing organic molecules injected at low pressure. It also uses a magnetic field as well as at least one cyclotronic electronic resonance zone (16) favoring the ionization and/or the disassociation of the injected gas. It includes an operation of screening of the different species produced in each cyclotronic electronic resonance zone, in order to exclusively authorize to the non-condensable free radicals of the type CxHyO, their access to a deposition zone (24) to produce the nanotube. An Independent claim is also included for a device for the production of a nanotube between two electrical conductors on a substrate by this method.