Monolithic microwave phase-shifter panel for radar and telecommunications incorporates polycrystalline silicon PIN diodes on a dielectric substrate

摘要

Phase shifter panel receiving an electromagnetic wave and radiating it in various directions comprises elementary cells. Each cell has a microwave phase-shifting circuit whose conducting surfaces (12a, 12b) are connected to two-state polycrystalline silicon PIN-type diodes (11) on a dielectric substrate (17). The conductive connections of the diodes are connected to a control circuit. Preferred Features: The phase-shifter panel that receives an electromagnetic wave linearly polarized along a given direction includes a microwave phase-shifting circuit having electrically conducting wires parallel to the given direction and located on the substrate. The wires are connected to the conducting surfaces for control of the semiconductor elements (two-state polycrystalline silicon PIN-type diodes), more or less normal to the wires. The conducting surfaces comprise microwave phase-shifting diaphragms. Each elementary cell is separated from an adjacent cell by conducting microwave uncoupling zones. The panel can include a wave energy distribution circuit comprising metallic distribution lines on a substrate surface and the network of phase-shifting cells. The distribution lines joined to a conducting surface under the substrate form waveguides. Each phase-shifting cell constitutes part of the distribution circuit in which are inserted selectable phase-shifting lines for the semiconductor elements. The panel can also include a wave distribution circuit on the surface of a second substrate comprising metallic distribution lines and enclosures comprising the phase-shifting microwave circuits connected at their lower surface to the distribution lines. Independent claims are given for: (a) a microwave electronic scanning aerial; and (b) a process for fabrication of a phase-shifting panel.