Method for beam control in a scanning microscope, arrangement for beam control in a scanning microscope, and scanning microscope

摘要

A method and an arrangement for beam control in a scanning microscope are disclosed. The scanning microscope comprises means for acquiring and displaying (3) a preview image (7) and a microscope optical system (51). Means for marking (5) at least one region of interest (27, 29) in the preview image (7) are provided. A first beam deflection device (43, 67, 68) displaces the scan field (31, 33) onto the region of interest (27, 29); and a second beam deflection device (49, 72, 94) serves for meander-shaped scanning within the scan field (31, 33).