Method for beam control in a scanning microscope, arrangement for beam control in a scanning microscope and scanning microscope

摘要

Method for beam control in a scanning microscope with the following steps: recording a preview image (7); Marking at least one region of interest (27, 29) in the preview image (7); Shifting the scan field (31, 33) to the region of interest (27, 29) by means of a first beam deflection device (43, 67, 78); and • taking an image by meander-scanning the region of interest (27, 29) with a second beam deflection device (49, 72, 82, 94), characterized in that the first and the second beam deflection means (72, 78, 82, 94) each two beam deflection modules (71 and 75, 81 and 83, 77 and 79, 93 and 95) are configured and that the beam deflecting modules (71 and 75, 81 and 83, 77 and 79, 93 and 95) by a gimballed mirror or a Micromirror or an acousto-optical deflector or a galvanometer mirror or a resonantly oscillating mirror system are formed.