THIN-FILM CONDUCTOR PATTERN, WIRING STRUCTURE OBJECT, PLANAR HEATER, AND MANUFACTURING METHOD OF THIN-FILM CONDUCTOR PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a thin-film conductor pattern which can be made without etching an ITO film, and its manufacturing method, and provide a wiring structure object equipped with the thin-film conductor pattern and a planar heater.;SOLUTION: The planar heater 1 is of a structure forming a conductive film 5 on the surface of a base material 3, forming an electrode 7 on either side of the conductive film 5 and with a chip LED 9 surface mounted on the conductive film. The conductive film 5 is the ITO film formed on the surface of the base material 3, with its part as low-resistance parts 11, 13, and another part as a high-resistance part. The low-resistance parts 11, 13 and the high-resistance part 15 are formed by partially exposing the ITO film to vapor, the part not exposed to the vapor becoming the low-resistance parts 11, 13, and the part exposed to the vapor becoming the high-resistance part 15.;COPYRIGHT: (C)2005,JPO&NCIPI