ELECTRON BEAM FOCUS CONTROLLING APPARATUS, POSTURE CONTROLLING APPARATUS FOR ELECTRON BEAM IRRADIATION HEAD, METHOD FOR CONTROLLING ELECTRON BEAM FOCUS, AND METHOD FOR CONTROLLING POSTURE OF ELECTRON BEAM IRRADIATION HEAD

摘要

PROBLEM TO BE SOLVED: To keep a just-focus state and to control fluctuation of the posture of a static pressure floating pad.;SOLUTION: The electron beam irradiation apparatus is equipped with: an electron lens 20 for adjusting the focus and an objective electron lens 21 which converge the electron beam in an electron gun 2; an elastic linking mechanism 5 which elastically links the static pressure floating pad 6; a displacement sensor which detects the displacement amount of the center of the static pressure floating pad 6 in the vertical direction with respect to a master disk 11; and a host side controlling unit and an electron gun side controlling unit which control the focus of the electron beam in accordance with the position of the static pressure floating pad 6 when the pad 6 rises in a non-contact state leaving a specified gap to the master disk 11, by converging the electron beam in the electron gun 2 by means of the electron lens 20 for adjusting the focus and of the objective electron lens 21 depending on the displacement amount detected by the displacement sensor.;COPYRIGHT: (C)2004,JPO&NCIPI