MINUTE ARTICLE ATTITUDE CONTROL DEVICE AND ATTITUDE CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide an attitude control device and an attitude control method, which control a position and an attitude of an aspherical minute article without contacting.;SOLUTION: The minute article attitude control device changes the attitude and position of the minute article attached with three fine grains on a surface thereof. The minute article attitude control device comprises two cameras, a beam output portion outputting three beams, a focus moving portion changing light paths of incident beams, a focusing portion focusing the three beams, a control portion, and an operating portion. The fine grains are shaped in a sphere, have refractive index higher than that of surrounding medium, and refracting the beam and allowing the beam to pass through the fine grains. The control device calculates three-dimensional position coordinates of the fine grains from a plurality of images obtained by the cameras, controls the focus moving portion to change the light paths of the beams incident to the focus moving portion so as to focus the beams to the three-dimensional position coordinates by the focusing portion, and controls the focus moving portion to change a focusing position of the beams by receiving instruction from the operating portion.;COPYRIGHT: (C)2004,JPO&NCIPI