MULTIPOINT MICROELECTRODE, BIOPOTENTIAL MEASURING DEVICE, MANUFACTURING METHOD OF MULTIPOINT MICROELECTRODE, AND MANUFACTURING METHOD OF BIOPOTENTIAL MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a pinnacle microelectrode easily at a low price, and to provide such as a biopotential measuring device sufficient for practical use.;SOLUTION: After electrode patterns constituting electrode wirings 13 and 14 for a measurement point 12 are made in order of precedence on a designated board 41, an insulating layer covering the electrode patterns and a foundation layer are removed by etching and the board 41 is exposed. The multipoint microelectrode is formed to have a pinnacle probe section, which is made by performing anisotropic etching on the board 41 using a designated etching solution, and a support section for the probe section.;COPYRIGHT: (C)2004,JPO&NCIPI