HEAT CONDUCTION STRUCTURE BETWEEN HEATING ELEMENT AND OBJECT TO BE HEATED

摘要

PROBLEM TO BE SOLVED: To provide a heat conduction structure or a heat conduction method between a heating element and an object to be heated excellent in heat uniformity and heat conduction efficiency at a comparatively low cost.;SOLUTION: The heat conduction structure carries out the heat conduction by interposing a heat conducting medium between the heating element 3 and the object to be heated 4, the heat conducting medium composed of many metal particles 5.;COPYRIGHT: (C)2004,JPO