TREATMENT DEVICE FOR INFLAMMABLE VOLATILE ORGANIC COMPOUND GAS, TREATMENT SYSTEM FOR THE SAME, AND METHOD OF TREATING THE SAME

摘要

PPROBLEM TO BE SOLVED: To provide a treatment device for inflammable VOC gas to efficiently remove inflammable VOC gas contained in exhaust gas and decompose it, and also to provide a treatment system for the same, and further provide a treatment method for the same. PSOLUTION: This device is provided with a gas introducing part 1, an adsorption part 2 to adsorb the inflammable VOC gas, a substitution gas supply part 6 to supply the substitution gas, a heating part 5, and a detection part 11 to detect concentration and temperature of oxygen gas. This treatment method comprises an adsorption process for adsorbing and removing the inflammable VOC gas in the adsorption part 2, a predesorption process for maintaining the concentration of the oxygen gas of 8% in atmosphere in the adsorption part 2 in which the inflammable VOC gas is adsorbed, a desorption process for desorbing the inflammable VOC gas through heating of the adsorption part 2, a combustion process for burning the desorbed inflammable VOC gas, and a cooling process for cooling the adsorption part 2 after combustion of the inflammable VOC gas. PCOPYRIGHT: (C)2004,JPO