HIGH-SENSITIVITY REFLECTION MEASURING APPARATUS AND HIGH-SENSITIVITY REFLECTION MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To perform high-sensitivity reflection measurement for a sample on a substrate other than metal.;SOLUTION: In the high-sensitivity reflection measuring apparatus for adhering a prism to a sample surface, allowing polarization infrared rays to enter the prism, and measuring the spectrum of infrared rays being reflected on the sample surface, the prism has a light semi-transmission metal deposition film on a surface in contact with at least the sample surface.;COPYRIGHT: (C)2004,JPO