METHOD FOR MANUFACTURING HYDROGEN-PERMEABLE FILTER, HYDROGEN-PERMEABLE FILTER AND SYSTEM FOR SUPPLYING HYDROGEN FUEL TO FUEL CELL BY USING THE FILTER

摘要

PPROBLEM TO BE SOLVED: To provide a compact filter for separating hydrogen with high permeation efficiency. PSOLUTION: The method for manufacturing the hydrogen-permeable filter comprises a step to form a thermal oxidation film 4 on each of both sides 2, 3 of a silicon substrate 1, a step to form a Pd-Ag alloy membrane 50 for permeating hydrogen selectively on the film 4 surface as one side 2 of the substrate 1 and form an SiOSB2/SBetching protection film 6 on the membrane 50, a step to pattern the film 4 on another side 3 of the substrate 1 correspondingly to a plurality of through-holes 7 to be formed on the substrate 1, a step to remove the portions becoming the through-holes 7 of the substrate 1 by etching on the basis of the patterned result, and a step to remove the film 6, the film 4 on the another side 3 surface of the substrate 1 and the film 4 at the through-holes 7 of the substrate 1 by etching. It is preferable that, before forming the membrane 50, a plurality of recessed parts are formed on the surface of the substrate 1 where the membrane 50 is formed. PCOPYRIGHT: (C)2004,JPO&NCIPI