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GROWTH METHOD OF FINE PARTICLE, GROWTH APPARATUS OF FINE PARTICLE, AND FINE PARTICLE

机译:细颗粒的生长方法,细颗粒的生长装置和细颗粒

摘要

PROBLEM TO BE SOLVED: To provide a growth method of fine particles and a growth apparatus thereof which permits the growth of the fine particles with the accuracy of atomic layer order in the radial direction.;SOLUTION: The growth of the fine particles having a structure in the radial direction is performed by using a micro reactor so that an increment speed v of the normalized radius r changes for the normalized growth time x according to the following functional form: 1-[F-1(x)]3, wherein, F(r)=(1/√3)tan-1[(1+2r)/√3]-(1/3)Log(-1+r)+(1/6)Log(1+r+r2)-(1/√3)tan-1[1/√3].;COPYRIGHT: (C)2004,JPO&NCIPI
机译:解决的问题:提供一种微粒的生长方法及其生长设备,该方法允许以径向上原子层顺序的精度生长微粒。解决方案:具有结构的微粒的生长通过使用微型反应器在径向上进行调整,以使归一化半径r的增加速度v根据归一化生长时间x根据以下函数形式变化:1- [F -1 ( x)] 3 ,其中,F(r)=(1 /√ 3)tan -1 [(1 + 2r)/√ 3]-(1 / 3)Log(-1 + r)+(1/6)Log(1 + r + r 2 )-(1 /√ 3)tan -1 [1 /√ 3] .;版权:(C)2004,JPO&NCIPI

著录项

  • 公开/公告号JP2004202361A

    专利类型

  • 公开/公告日2004-07-22

    原文格式PDF

  • 申请/专利权人 SONY CORP;

    申请/专利号JP20020374185

  • 发明设计人 ISHIBASHI AKIRA;

    申请日2002-12-25

  • 分类号B01J19/00;H01L29/06;

  • 国家 JP

  • 入库时间 2022-08-21 23:33:51

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