ANALYTICAL METHOD AND ANALYTICAL DEVICE OF CLUSTER-LIKE AMORPHOUS INCLUSION

摘要

PPROBLEM TO BE SOLVED: To provide an analytical method for determining a cluster-like amorphous inclusion in a steel accurately and quickly. PSOLUTION: The position of the inclusion is specified, and the distance between mutual inclusions is measured, and composition analysis of the inclusion is performed based on an image processing result acquired by utilizing brightness of a reflected electron image or a secondary electron image acquired by irradiating an analytical object sample with electron beams. The inclusion wherein the distance between mutual inclusions is within a reference distance set beforehand and combination of elements constituting the inclusion is mutually the same is determined as an inclusion constituting the cluster-like amorphous inclusion. PCOPYRIGHT: (C)2004,JPO