METHOD AND DEVICE FOR DETECTING ABERRATION OF OPTICAL LENS, AND DIFFRACTION GRATING FOR SENSING ABERRATION

摘要

PROBLEM TO BE SOLVED: To shorten a time for aberration detection down to 2/3 or less of the conventional time by enabling the detection of astigmatism without rotating a diffraction grating.;SOLUTION: A method for detecting aberration of an optical lens makes light emitted from a light source 2 incident on the optical lens, makes condensed light from the optical lens incident on a diffraction grating 20 having first grating grooves arranged at constant pitches and second grating grooves intersected with the first grating grooves and arranged at constant pitches, forms sharing interference fringes having a plurality of interference regions mutually making angles by light emitted from the diffraction grating 20, measures a phase of light intensity change at a point in the interference region of the sharing interference fringes, and detects the astigmatism without rotating the diffraction grating 20 by detecting aberration by the phase.;COPYRIGHT: (C)2004,JPO&NCIPI