LINEAR STAGE, LINEAR POSITIONER AND LINEAR SPIN STAND

摘要

PROBLEM TO BE SOLVED: To provide a precise positioning system with a linear driving means which exhibits high performance stably even when a size or an attaching position of a device mounted on a linear stage is changed.;SOLUTION: The system suppresses yawing by sliding, adjusting and fixing an attaching position of a magnet-yoke of a linear motor in the orthogonal direction to the moving direction depending on an attaching position and the mass of a work mounted on the linear stage, suppresses pitching by attaching a balance weight which is slid and fixed toward the orthogonal direction to a movable part, and always makes a thrusting position coincide with a gravity center position by adjusting both of the yawing and the pitching even when the work mounted on the movable part is changed.;COPYRIGHT: (C)2004,JPO