OPTICAL ELEMENT, METHOD FOR MANUFACTURING OPTICAL ELEMENT, APPARATUS FOR CORRECTING PHASE DEFECT IN OPTICAL ELEMENT, AND METHOD FOR CORRECTING PHASE DEFECT IN OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for correcting a phase defect in an optical element to correct a recessed defect which induces an insufficient phase and can not be conventionally corrected.;SOLUTION: The apparatus for correcting a phase defect of an optical element aims to correct a phase defect in an optical element of a phase shift mask 4 which transfers a required pattern onto a wafer by using the wave properties of light. The apparatus is equipped with: a phase difference shortage detecting means to detect the position and the amount of the phase difference shortage as a recessed defect of the mask 4 which would be produced when the mask is used to transfer a pattern onto a wafer; an XY direction positioning means to mount the mask 4 and to determine the position of mask 4 in the XY directions; an optical system to correct the phase difference shortage of the mask by irradiating the position of the phase difference shortage of the mask 4 detected by the phase difference shortage detecting means with ultrashort pulse laser light 1; and a focus adjusting means to adjust to align the focus of the mask 4 and the laser light 1 based on the intensity of the reflected light from the mask 4.;COPYRIGHT: (C)2004,JPO