ORIGIN ADJUSTING TOOL FOR GALVANOMETER SCANNER IN LASER EXPOSURE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a tool which makes it easy to adjust the origin of a galvanometer scanner in a laser exposure system.;SOLUTION: A main body A is constituted by coupling divided cylinders 10a, 10b, 10c, 10d, and 10e. At the upper end of the main body A, a male screw 11 for fitting to an origin adjustment disk 7 provided to the galvanometer scanner 1 in the laser exposing device is provided and at the lower end, a target 12 is provided. Two pinhole disks 13 and 13 are provided above the target 12 and laser passage confirmation windows 14 and 14 are provided above them.;COPYRIGHT: (C)2004,JPO