LINEWIDTH MEASURING APPARATUS, LINEWIDTH MEASURING METHOD, AND MASK FOR LINEWIDTH MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To rapidly measure fluctuations in linewidth regardless of the number of fine patterns to be measured.;SOLUTION: The apparatus comprises means 13 to 17 which capture a diffraction image of a substrate comprising different shot areas, each having repetition patterns transferred thereto and a means 17 which calculates fluctuations in linewidth of the repetition patterns transferred to the different shot areas by comparing the brightness information of each part corresponding to each repetition pattern with respect to the different shot areas in the diffraction image.;COPYRIGHT: (C)2004,JPO&NCIPI