CERAMIC SUBSTRATE, SURFACE TREATMENT METHOD FOR CERAMIC SUBSTRATE, AND METHOD FOR FORMING THIN FILM ON ROUGHENED SURFACE OF CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate in which a thin film excellent in adhesion is formed to a face even when a ceramic part and a metal part mixedly exist in the same face.;SOLUTION: The ceramic substrate comprises an insulating base material 2 made of an AIN and a conductor layer 3 made of metals. The surface roughness Ra1 of the insulating base material 2 is made 0.01-5μm. The surface roughness Ra2 of the conductor layer 3 is made 0.002-2μm. The surface roughness Ra1 of the insulating base material 2 is larger than the surface roughness Ra2 of the conductor layer 3.;COPYRIGHT: (C)2004,JPO