The metal accumulation cluster tool which includes metal membrane accumulation method and super critical drying/cleaning module

摘要

(57) Abstract The method of making the metal membrane accumulate on the backing material, includes super critical pre- clean step, super critical removal and re-installation step, and metal accumulation step. It is desirable, pre- clean step includes super critical carbon dioxide and the fact that contacting with the backing material, it maintains the chelation medicine in order to remove oxide layer from the metal surface of the backing material. It is more desirable, pre- clean step, contacting with the backing material, super critical carbon dioxide, includes the fact that the chelation medicine and acid are maintained. Or, pre- clean step, making contact with oxide layer, includes super critical carbon dioxide and the fact that amine is maintained. Removal and re-installation step includes the fact that contacting with the backing material, it maintains super critical carbon dioxide in order to remove the adsorption material. Metal accumulation step makes the metal membrane accumulate on the backing material without bleaching the backing material in the non-volatile material which at the same time is adsorbed into the backing material without bleaching the backing material in the material which oxidizes the metal surface of the backing material which next, the pre- cleanliness is done. The device in order to make the metal membrane accumulate on the backing material, includes transport module, super critical processing module, vacuum module, and metal accumulation module. Super critical processing module is connected to transport module. Vacuum module makes metal accumulation module transport module connect. At the time of operating, the device in order to make the metal membrane accumulate, does super critical pre- clean step, super critical removal and re-installation step and metal accumulation step.